JPH0546274Y2 - - Google Patents

Info

Publication number
JPH0546274Y2
JPH0546274Y2 JP1985134743U JP13474385U JPH0546274Y2 JP H0546274 Y2 JPH0546274 Y2 JP H0546274Y2 JP 1985134743 U JP1985134743 U JP 1985134743U JP 13474385 U JP13474385 U JP 13474385U JP H0546274 Y2 JPH0546274 Y2 JP H0546274Y2
Authority
JP
Japan
Prior art keywords
contact hole
insulating film
interlayer insulating
upper electrode
multilayer wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985134743U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6242244U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985134743U priority Critical patent/JPH0546274Y2/ja
Publication of JPS6242244U publication Critical patent/JPS6242244U/ja
Application granted granted Critical
Publication of JPH0546274Y2 publication Critical patent/JPH0546274Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP1985134743U 1985-09-03 1985-09-03 Expired - Lifetime JPH0546274Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985134743U JPH0546274Y2 (en]) 1985-09-03 1985-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985134743U JPH0546274Y2 (en]) 1985-09-03 1985-09-03

Publications (2)

Publication Number Publication Date
JPS6242244U JPS6242244U (en]) 1987-03-13
JPH0546274Y2 true JPH0546274Y2 (en]) 1993-12-03

Family

ID=31036269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985134743U Expired - Lifetime JPH0546274Y2 (en]) 1985-09-03 1985-09-03

Country Status (1)

Country Link
JP (1) JPH0546274Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6309907B2 (ja) * 2015-03-11 2018-04-11 株式会社東芝 半導体装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6079748A (ja) * 1983-10-06 1985-05-07 Sanyo Electric Co Ltd 半導体集積回路の多層配線構造

Also Published As

Publication number Publication date
JPS6242244U (en]) 1987-03-13

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